A New Nonlinear Self-Tuning Run-to-Run Controller for the Semiconductor Manufacturing Process

Autor:	Jae Jun Yun, Jun-Geol Baek, Sang Hoon Park, Jun Seok Kim, Cheong Sool Park
Rok vydání:	2012
Předmět:	Nonlinear system General Energy Health (social science) General Computer Science Control theory Semiconductor device fabrication Computer science General Mathematics General Engineering Self-tuning Control engineering General Environmental Science Education
Zdroj:	Advanced Science Letters. 14:458-463
ISSN:	1936-7317 1936-6612
DOI:	10.1166/asl.2012.4045
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fd00ed39485ed7e69e8fc03b40b499ef https://doi.org/10.1166/asl.2012.4045 Zobrazit plný text záznamu