Reprint of: Effect of pulse parameter change on a-SiCN diaphragms for environmental cells fabricated by magnetic-field- and pulsed-plasma-enhanced chemical vapor deposition

Autor:	Masanori Murano, Takaomi Matsutani, Tadahiro Kawasaki
Rok vydání:	2019
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Zdroj:	Vacuum. 167:542-546
ISSN:	0042-207X
DOI:	10.1016/j.vacuum.2019.03.043
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fce61939c2d624bee58fee0af53e83d3 https://doi.org/10.1016/j.vacuum.2019.03.043 Zobrazit plný text záznamu Full Text from ScienceDirect