On the Mechanism of Growth of CdTe by Organometallic Vapor‐Phase Epitaxy

Autor: Sorab K. Ghandhi, Ishwara B. Bhat, N. R. Taskar
Rok vydání: 1987
Předmět:
Zdroj: Journal of The Electrochemical Society. 134:195-198
ISSN: 1945-7111
0013-4651
DOI: 10.1149/1.2100404
Popis: In this paper are presented some experimental results to explain mechanisms involved in the growth of CdTe by organometallic vapor-phase epitaxy (OMVPE). A pyrolysis study of dimethylcadmium (DMCd) was conducted in an OMVPE reactor, in the temperature range 230/sup 0/-400/sup 0/C. It was found that dimethylcadmium decomposes above approximately 230/sup 0/C and the reaction is heterogeneous from 230/sup 0/ to 370/sup 0/C. CdTe growth was also studied over a range of temperature from 300/sup 0/ to 375/sup 0/C and for various reactor parameters. In all cases, the CdTe deposition rate was found to be closely related to the decomposition of dimethylcadmium. A model is presented to explain the CdTe growth at low temperatures where diethyltelluride is very stable. The growth of CdTe, using diethyltelluride and elemental cadmium, was demonstrated and supports the model. The growth rate of CdTe was studied as a function of the partial pressure of DMCd and DETe, and the results were explained in light of this growth model.
Databáze: OpenAIRE