Development of Pneumatic Servo Bearing Actuator for Nanometer Positioning

Autor:	Hiroshi Yabe, Katsumi Sasaki, Masato Kadotani, Takashi Matsuoka, Satoshi Katto, Takakazu Kitagawa, Tomoko Hirayama
Rok vydání:	2009
Předmět:	Bearing (mechanical) Materials science Pneumatic actuator Mechanical Engineering Feedback control Aerostatic bearing Mechanical engineering Industrial and Manufacturing Engineering law.invention law Control theory Nanometre Actuator Servo
Zdroj:	International Journal of Automation Technology. 3:249-256
ISSN:	1883-8022 1881-7629
DOI:	10.20965/ijat.2009.p0249
Popis:	The ‘pneumatic servo bearing actuator (PSBA)’ that consists of an aerostatic bearing and a servo valve was proposed and developed for ultraprecise positioning. In the actuator, pressurized air controlled by the servo valve moves an actuated spool ultra-precisely. Even under open-loop control, the PSBA provided accurate replication and positioning resolution on a nanometer order. Applying simple positioning feedback and parallel observation that estimates the disturbance into the system increased the actuator stiffness to be almost infinite and promoted a sharp step response without drift and hysteresis, and thus the minimum positioning resolution of prototype PSBA was about 1 nm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fca9dd588847dbf043688725c6331eb8 https://doi.org/10.20965/ijat.2009.p0249 Zobrazit plný text záznamu