Annealing studies of Ti/Al multilayer film by slow positron beam
Autor: | Liujiang Zhang, Runsheng Yu, Dailian Wang, Baoqiang Wang, Lei Wei |
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Rok vydání: | 2007 |
Předmět: |
Materials science
Annealing (metallurgy) Positron beam Detector Analytical chemistry General Physics and Astronomy Surfaces and Interfaces General Chemistry Condensed Matter Physics Molecular physics Surfaces Coatings and Films Condensed Matter::Materials Science Film structure Condensed Matter::Superconductivity Spectroscopy Doppler broadening |
Zdroj: | Applied Surface Science. 253:7309-7312 |
ISSN: | 0169-4332 |
Popis: | Single detector and coincidence Doppler broadening (CDB) spectroscopy measurements using slow positron beam were carried out to study as-deposited and annealed Ti/Al multilayer films. The changes of the film structure and defects in each layer by heat treatment have been investigated through the analysis of Doppler broadening lineshape variation. The coincidence Doppler broadening measurements revealed that Ti is the dominant diffusion species during the alloying process of Ti/Al by high temperature annealing. These results highlight the potential of slow positron beam in characterizing the vacancy-type defects evolution and mechanism of interlayer diffusion in Ti/Al multilayer film. |
Databáze: | OpenAIRE |
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