Synthesis and characterization of volatile bismuth .beta.-diketonate compounds for metal-organic chemical vapor deposition of thin films
| Autor: | A. E. Kaloyeros, K. C. Brooks, V. Tulchinsky, Robert M. Barkley, S. B. Turnipseed, Robert E. Sievers |
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| Rok vydání: | 1992 |
| Předmět: |
Diketone
Hybrid physical-chemical vapor deposition Chemistry General Chemical Engineering Inorganic chemistry chemistry.chemical_element General Chemistry Chemical vapor deposition Combustion chemical vapor deposition Bismuth Metal Carbon film visual_art Materials Chemistry visual_art.visual_art_medium Organic chemistry Thin film |
| Zdroj: | Chemistry of Materials. 4:912-916 |
| ISSN: | 1520-5002 0897-4756 |
| DOI: | 10.1021/cm00022a030 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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