Sensitivity enhancement in OCD metrology by optimizing azimuth angle based on the RCWA simulation

Autor:	Hyunsuk Choi, Kwangseok Lee, Jiseong Doh, Jaehoon Jeong, Taeshin Kwag, Minseok Kim, Yeonjeong Kim, Jongchul Kim, Hyung Keun Yoo, Dae Sin Kim
Rok vydání:	2023
Předmět:	Materials Chemistry Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Solid-State Electronics. 200:108574
ISSN:	0038-1101
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fca30b29a4455605fb2ba86274296250 https://doi.org/10.1016/j.sse.2022.108574 Zobrazit plný text záznamu Full Text from ScienceDirect