Development and characterization of an improved Ti-Zr-V thin-film getter with 3D porous nano-scaffolds

Autor:	Qing Cao, Xianyi Wang, Sihui Wang, Bang Xiao, Jun Wu, Shuyi Gan, Xudong Yuan, Pengcheng Li
Rok vydání:	2023
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Zdroj:	Vacuum. 209:111747
ISSN:	0042-207X
DOI:	10.1016/j.vacuum.2022.111747
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fc8ee4e5d909dceacf1c11f2a2faac94 https://doi.org/10.1016/j.vacuum.2022.111747 Zobrazit plný text záznamu Full Text from ScienceDirect