Impedance spectroscopy in micro systems
| Autor: | M Pilaski, M.M. Lohrengel, T Hamelmann, A. Moehring |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Yield (engineering)
Materials science Passivation business.industry General Chemical Engineering Spatially resolved Resolution (electron density) Metallurgy Dielectric spectroscopy chemistry.chemical_compound chemistry Electrochemistry Optoelectronics Crystallite business Chromium nitride Electrical impedance |
| Zdroj: | Electrochimica Acta. 47:2127-2134 |
| ISSN: | 0013-4686 |
| Popis: | Impedance spectroscopy in a potentiostatic three-electrode configuration is extended to spatially resolved surface analysis with a resolution of about 10 μm, which is interesting for very many technical systems. Dot-by-dot experiments or complete surface scans to yield impedance images are presented. Examples of technical applications are the investigation of defects in CrNx hard coatings on Mg alloys, the grain dependent passivation of polycrystalline metals, and structuring of ultrathin Al films. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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