Physical and Electrical Characteristics of Poly-Si/ZrO2/SiO2/Si MOS Structures
| Autor: | Kwan-Yong Lim, In-Seok Yeo, Dae-Gyu Park, Il-Sang Choi, Jinwon Park, Heung-Jae Cho, Jung-Kyu Ko, Hee-koo Yoon, Joong-Jung Kim, Jun-Mo Yang, Jae-Young Kim |
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| Rok vydání: | 2001 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.2001.b-8-3 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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