Wet chemical etching of molten KOH/NaOH eutectic alloy to evaluate AlN single crystal

Autor:	Bong Geun Choi, Cheol Woo Park, Kwang Bo Shim, Seong Kuk Lee, Dong Keun Oh, Yoon Pyo Hong, Jae Hwa Park
Rok vydání:	2014
Předmět:	Materials science Etching (microfabrication) Metallurgy Dry etching Reactive-ion etching Single crystal Isotropic etching Eutectic system
Zdroj:	Journal of the Korean Crystal Growth and Crystal Technology. 24:237-241
ISSN:	1225-1429
DOI:	10.6111/jkcgct.2014.24.6.237
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fc0d1799f3096ce12143945fea8a127b https://doi.org/10.6111/jkcgct.2014.24.6.237 Zobrazit plný text záznamu