Microscopic and electrochemical monitoring of the cathodic degradation of polyimide-coated A1 metallization

Autor: S. Jeanjaquet, M. Kendig, J. Lumsden, R. C. Addison
Rok vydání: 1993
Předmět:
Zdroj: Electrochimica Acta. 38:1877-1881
ISSN: 0013-4686
DOI: 10.1016/0013-4686(93)80309-n
Popis: Cathodic degradation of polyimide-coated aluminum metallization on Si substrates has been investigated using electrochemical impedance spectroscopy simultaneously with either light optical or acoustic microscopy. Water uptake by the polyimide can be monitored using the coating capacitance and correlates with a change in the polyimide acoustic response. The capacitance of a defect increases with the area degraded by cathodic corrosion due to external cathodic bias.
Databáze: OpenAIRE