An integrated sensor head in silicon for contactless detection of torque and force
| Autor: | Pirmin Rombach, Werner Langheinrich |
|---|---|
| Rok vydání: | 1994 |
| Předmět: |
Materials science
business.industry Metals and Alloys Electrical engineering Magnetostriction Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Magnetic field Magnetic circuit CMOS Electromagnetic coil Permeability (electromagnetism) Torque Optoelectronics Torque sensor Electrical and Electronic Engineering business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 42:410-416 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/0924-4247(94)80023-5 |
| Popis: | An integrated micromachined torque sensor head in silicon for contactless detection of torque and force is described. It is based on a magnetic yoke with an exciting and a receiving coil that detects the change of permeability of a rotating shaft and an amorphous ribbon with strong magnetostrictive properties, respectively. The designed sensor head determines directly the change of permeability μ by measuring the magnetic flux density in the air gap between the yoke and the amorphous ribbon (shaft). The problem arising with this kind of torque measurement is the variation of the air gap when the shaft is rotating, and especially when a torque is applied. The sensor presented here allows the influence of the air-gap variation to be eliminated by differential measurement of the magnetic flux density. 3-D simulations of the magnetic circuit show the magnetic properties of the sensor head. The development of the complete integrated sensor head starts with components like an NiFe yoke shaped by KOH etched membranes, coils with a large cross-sectional area and CMOS MAGFETs. |
| Databáze: | OpenAIRE |
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