Communication—Defect-Free Filling of High Aspect Ratio Through Vias in Ultrathin Glass
| Autor: | Jie-Chi Chen, Meng-Chi Huang, Prantik Mazumder, Pei-Lien Tseng, Scott Pollard, Hung-Yi Lin, Yiu-Hsiang Chang, Jen-Chieh Lin |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Renewable Energy Sustainability and the Environment business.industry 020209 energy 010401 analytical chemistry Defect free 02 engineering and technology Condensed Matter Physics 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials 0202 electrical engineering electronic engineering information engineering Materials Chemistry Electrochemistry Optoelectronics business |
| Zdroj: | Journal of The Electrochemical Society. 166:D3155-D3157 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/2.0181901jes |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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