Atomic Layer Deposition Grown Hafnia Nanotubes Functionalized with Gold Nanoparticle Composites
| Autor: | Tarek M. Abdel-Fattah, Diefeng Gu, Helmut Baumgart |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Materials science
Aqueous solution biology Silicon Scanning electron microscope technology industry and agriculture chemistry.chemical_element Nanoparticle Nanotechnology Hafnia biology.organism_classification Electronic Optical and Magnetic Materials Hafnium Atomic layer deposition chemistry Chemical engineering Colloidal gold Electrical and Electronic Engineering |
| Zdroj: | ECS Solid State Letters. 2:P31-P34 |
| ISSN: | 2162-8750 2162-8742 |
| DOI: | 10.1149/2.001303ssl |
| Popis: | Tetrakis(dimethylamido) hafnium(IV) (TDMAHf) precursor and water vapor as an oxidant were employed to synthesize hafnia (HfO2). Atomic layer deposition (ALD) was used to fabricate highly ordered hafnia nanotubes within the tubular channels of macro-porous silicon (Si) templates. Subsequently, the hafnia nanotubes were harvested from the porous Si template by chemical dissolution of the Si matrix using aqueous NaOH. We synthesized gold-polymer composite from 35 nm diameter gold nanoparticles (AuNPs) modified with 11-mercaptoundecanoic acid in order to functionalize the surface of the ALD grown HfO2 nanotubes. Scanning electron microscopy (SEM) and transmission electron spectroscopy (TEM) were used for physical analysis in order to characterize the morphology of the Si template, the AuNPs and the resultant HfO2 tubes functionalized with gold nanoparticles. |
| Databáze: | OpenAIRE |
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