Cryogenic on-wafer microwave characterization of GaAs MESFETs and superconducting coplanar resonance and transmission lines structures

Autor:	Ralph A. Schweinfurth, Douglas W. Barlage, D. J. Van Harlingen, C. E. Platt, Milton Feng, Dan Scherrer, J. Kruse, F. Gao
Rok vydání:	1994
Předmět:	Materials science business.industry Cryogenics Integrated circuit law.invention Gallium arsenide Resonator chemistry.chemical_compound chemistry law Electronic engineering Optoelectronics Wafer Field-effect transistor Thin film business Microwave
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.166152
Popis:	make s-parameter measurements of passive coplanar circuits as well as to characterize the performance of GaAsMESFETs at 80K. Comparisons were made between measured data and theoretical results for passive YBCO andAluminum structures. The YBCO film was also measured using a parallel plate technique to determine microwave
Databáze:	OpenAIRE
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