Characteristics of 1.3 µm Laser Diode with Carbon-Doped InAlAs Layer
Autor: | Kenji Shimoyama, Nobuhiro Arai, Kaori Kurihara |
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Rok vydání: | 2005 |
Předmět: | |
Zdroj: | Japanese Journal of Applied Physics. 44:L451 |
ISSN: | 1347-4065 0021-4922 |
DOI: | 10.1143/jjap.44.l451 |
Popis: | InAlGaAs-based laser diodes with carbon doping have been demonstrated. The epitaxial conditions of the carbon doping in InAlAs are critically limited in terms of reduction in oxygen contamination, when carbon concentration is increased. This limitation is more severe at high temperatures. We investigated the most appropriate growth conditions for reducing contamination and realized C-InAlAs with a carrier concentration of 1 ×1018 cm-3 even at a temperature as high as 618°C. We then fabricated a broad-stripe 1.3 µm laser with C-InAlAs and found that this laser shows optical characteristics superior to those with Zn-doped InAlAs. |
Databáze: | OpenAIRE |
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