Spatial scanning-probe array system for silicon-on-insulator integrated circuits

Autor:	Wen-Ren Yang
Rok vydání:	2008
Předmět:	Discrete wavelet transform Very-large-scale integration Signal processing Materials science Silicon on insulator Hardware_PERFORMANCEANDRELIABILITY Integrated circuit Signal Die (integrated circuit) law.invention law Hardware_INTEGRATEDCIRCUITS Electronic engineering Optical filter
Zdroj:	2008 51st Midwest Symposium on Circuits and Systems.
DOI:	10.1109/mwscas.2008.4616948
Popis:	A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect die cracks. The post signal processing by using discrete wavelet transform (DWT) for scattered optical signal is also proposed and simulated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fb7c9ddfca9db349c50b6f8e76e03683 https://doi.org/10.1109/mwscas.2008.4616948 Zobrazit plný text záznamu