| Autor: |
Larry R. Baylor, Robert J. Delahanty, Louis J. Schaefer, Philip R. Bingham, Kathy W. Hylton, Kenneth W. Tobin, Gregory R. Hanson, George C. John, Long Dai, Michael L. Jones, Joel D. Hickson, J.H. Price, Ayman M. El-Khashab, Michael W. Mayo, Christopher J. Doti, Robert L. Fisher, Mark A. Schulze, Thomas R. Scheidt, Martin A. Hunt, Judd M. Gilbert, Robert W. Owen, Paul G. Jones, William R. Usry, C. E. Thomas, Matt Chidley, Philip D. Schumaker, Tracy M. Bahm, Allen N. Su, Steven W. Burns, Karsten S. Weber, Bichuan Shen, Ian M. Mcmackin, Dave R. Patek, Ken R. Macdonald, James S. Goddard, David A Rasmussen, Randall G. Smith, Edgar Voelkl |
| Rok vydání: |
2002 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.475659 |
| Popis: |
A method for recording true holograms (not holographic interferometry) directly to a digital video medium in a single image has been invented. This technology makes the amplitude and phase for every pixel of the target object wave available. Since phase is proportional to wavelength, this makes high-resolution metrology an implicit part of the holographic recording. Measurements of phase can be made to one hundredth or even one thousandth of a wavelength, so the technology is attractive for finding defects on semiconductor wafers, where feature sizes are now smaller than the wavelength of even deep ultra-violet light. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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