| Autor: |
Masaki Michihata, Satoru Takahashi, Shotaro Kadoya, Masahiro Kume, Yizhao Guan |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
Optical Technology and Measurement for Industrial Applications Conference 2021. |
| DOI: |
10.1117/12.2616266 |
| Popis: |
The optical-based super-resolution, non-invasive method is preferred for the inspection of surfaces with massive microstructures widely applied in functional surfaces. The Structured Illumination Microscopy (SIM) uses standing-wave illumination to reach optical super-resolution. Recently, coherent SIM is being studied. It can obtain both the super-resolved intensity distribution and the phase and amplitude distribution from the sample surface. By analysis of the phase-depth dependency, the depth measurement for microgroove structures with coherent SIM is expected. FDTD analysis is applied for observing the near-field response of microgroove narrower than the diffraction limit under the standing-wave illumination. The near-field phase shows depth dependency in this analysis. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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