Adhesion mechanism between laser sputtered Aluminum nano particles on Si-Wafer by Nd:YAG laser
| Autor: | M. H. Azhdast, Veronika Glaw, H. J. Eichler, K.-D. Lang |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
business.industry Nanoparticle 02 engineering and technology Adhesion Substrate (electronics) 021001 nanoscience & nanotechnology Laser 01 natural sciences law.invention 010309 optics Optics Sputtering law Nd:YAG laser 0103 physical sciences Optoelectronics Wafer 0210 nano-technology business Layer (electronics) |
| Zdroj: | Conference on Lasers and Electro-Optics. |
| DOI: | 10.1364/cleo_at.2016.ath1k.7 |
| Popis: | In this research, different laser parameters is investigated using Nd:YAG Picosecond laser to sputter nano particles on Si-Wafer substrate. Furthermore, the influence of various parameters on adhesion tests and mechanism of deposited layer is studied. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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