Fine structure of carbon films deposited from a microwave low-pressure gas discharge

Autor:	R. K. Yafarov, A. A. Alekhin, S. Yu. Suzdal’tsev
Rok vydání:	2003
Předmět:	Matrix (chemical analysis) chemistry.chemical_classification Carbon film Hydrocarbon Materials science Physics and Astronomy (miscellaneous) Chemical engineering chemistry Extraction (chemistry) Plasma Microwave Phase diagram Electric discharge in gases
Zdroj:	Technical Physics Letters. 29:649-651
ISSN:	1090-6533 1063-7850
DOI:	10.1134/1.1606777
Popis:	We have studied the conditions of synthesis and the fine structure of carbon films of various structural modifications possessing preset electrical properties. The phase diagram of polymorphous transformations is constructed for carbon films grown from the plasma of microwave discharge in low-pressure ethanol vapor. Technological factors influencing the efficiency of extracting diamondlike microcrystals from a hydrocarbon matrix have been studied. Depending on the extraction regime and initial layer thickness, the size of extracted microcrystals can vary from 10–12 to 100–120 nm, while their surface concentration may reach 1.4×107 cm−2.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fae5eeae681f29fc917af1992354e1bc https://doi.org/10.1134/1.1606777 Zobrazit plný text záznamu Plný text ve formátu PDF