Quantitative nanoscale coherence tomography with extreme ultraviolet light

Autor:	Christian Rödel, Felix Wiesner, Gerhard G. Paulus, Jan Nathanael, Martin Wünsche, Silvio Fuchs, Johann J. Abel, Julius Reinhard
Rok vydání:	2020
Předmět:	Materials science medicine.diagnostic_test business.industry Semiconductor device Optics Optical coherence tomography Extreme ultraviolet medicine High harmonic generation Tomography business Phase retrieval Nanoscopic scale Coherence (physics)
Zdroj:	OSA High-brightness Sources and Light-driven Interactions Congress 2020 (EUVXRAY, HILAS, MICS).
Popis:	We present nanoscale coherence tomography (XCT) in the extreme ultraviolet range driven by a high-harmonic generation (HHG) light source. Using a novel phase retrieval algorithm, XCT enables non-destructive, quantitative, cross-sectional imaging, of, e.g., semiconductor devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fadde4aed79a0a9b61e1ea3ffd48a42d https://doi.org/10.1364/euvxray.2020.ew3a.3 Zobrazit plný text záznamu