Simulation of RHEED intensity oscillations during MBE growth

Autor: J.P.A. van der Wagt, James S. Harris
Rok vydání: 1993
Předmět:
Zdroj: Journal of Crystal Growth. 127:1025-1029
ISSN: 0022-0248
DOI: 10.1016/0022-0248(93)90782-r
Popis: We develop a quantitative model for computation of the RHEED signal intensity during epitaxial growth. The growth surface is described in a way that naturally allows for tilted substrates. Oscillations in the computed RHEED signal during MBE growth exhibit a very fast decay. We are able to identify the fast initial rise of the signal after stopping growth with disappearing single atoms, and the slower subsequent recovery with growing terrace sizes.
Databáze: OpenAIRE