Effects of surface diffusion on thin-film morphology: a computer study

Autor:	Robert B. Sargent
Rok vydání:	1990
Předmět:	Diffusion layer Surface diffusion Optics Materials science business.industry Surface roughness Evaporation Thermodynamics Grain boundary diffusion coefficient Deposition (phase transition) Thin film Diffusion (business) business
Zdroj:	Modeling of Optical Thin Films II.
ISSN:	0277-786X
DOI:	10.1117/12.22412
Popis:	A two-dimensional hard-disk model of thin-film deposition is described; the model is of the type originally introduced by Henderson et al.1 We have implemented a simple (and necessarily approximate) way to incorporate the effects of surface diffusion in our model, and a means to connect the input parameters of the computer algorithm to the evaporation parameters of substrate temperature and evaporation rate. The effects of surface diffusion and vapor-incidence angle on film structure are explored; the effects of surface diffusion predicted by the model correlate with the transition in film structure (Zone 1 to Zone 2) first described by Movchan and Demchishin.2
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fa9c56de6a3af2765fc1fe1c67ee20a4 https://doi.org/10.1117/12.22412 Zobrazit plný text záznamu