Analysis of fluidic and mechanical motion in MEMS by using high speed X-ray micro-imaging techniques

Autor: Tzong-Shyng Leu, Richard P. Wildes, Ann-Marie Lanzillotto, Michael Amabile
Rok vydání: 2002
Předmět:
Zdroj: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
DOI: 10.1109/sensor.1997.613604
Popis: We describe studies of micro structure and micro motion in several microsystems using unique high speed X-ray imaging techniques. By way of illustration, we have imaged and measured steady state flow in micro pipes of various shapes and sizes using a high frame rate CCD camera. These experimental results were compared with macroscopic flow models. Also, new X-ray stroboscopic techniques have been developed which allow us to image periodic motion up to kHz rates. To demonstrate this new capability, we studied the dynamic response of a micro electromagnetic optical switch. Finally, we have applied X-ray microtomography in an investigation of the internal micro structure of inkjet print heads.
Databáze: OpenAIRE