Statistical measurement of mid-spatial frequency defects of large optics

Autor:	Yan Deng, Feizhou Wang, Qikai Shi, Jiancheng Xu
Rok vydání:	2012
Předmět:	Image stitching Interferometry Optics business.industry Applied Mathematics Measure (physics) Spatial frequency Statistical theory business Translation (geometry) Instrumentation Engineering (miscellaneous) Mathematics
Zdroj:	Measurement Science and Technology. 23:065201
ISSN:	1361-6501 0957-0233
Popis:	A statistical method is proposed to measure the power-spectral density (PSD) of the mid-spatial frequency defects of large optics. The method measures the geometrical defects of large optics by a large-aperture low-resolution interferometer, and then measures the mid-spatial frequency defects of every subregion in large optics by a small-aperture high-resolution interferometer. Statistical theory shows that the PSD of mid-spatial frequency defects in large optics approximately equals the weighted average of that in every subregion. Simulation and experiment demonstrate the effectiveness and feasibility of the proposed method. The proposed statistical method is not sensitive to the translation stage's error and thus is more appropriate for measurement of the mid-spatial frequency defects of large optics than the traditional sub-aperture stitching interferometry.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::fa6e30d6769147ae3c29b33ac14df182 https://doi.org/10.1088/0957-0233/23/6/065201 Zobrazit plný text záznamu