Single Source Precursors to Group III (13) Metal Nitrides

Autor:	Thomas D. Getman, Gary W. Franklin
Rok vydání:	1995
Předmět:	Indium nitride Inorganic chemistry chemistry.chemical_element Gallium nitride Chemical vapor deposition Nitride Inorganic Chemistry Metal chemistry.chemical_compound chemistry Aluminium Group (periodic table) visual_art visual_art.visual_art_medium Thin film
Zdroj:	Comments on Inorganic Chemistry. 17:79-94
ISSN:	1548-9574 0260-3594
DOI:	10.1080/02603599508035783
Popis:	A review of the preparation of single source precursors (SSPs) to the group III metal nitrides (aluminum nitride, gallium nitride and indium nitride) is given. The SSPs are divided into three categories (1) volatile small molecules for chemical vapor deposition studies, (2) polymeric precursors for the formation of fibers and thin films, and (3) compounds developed for the formation of small-particle powders. The methods for conversion of the SSPs into the desired nitrides and the analysis of the resulting nitride materials are given whenever possible.
Databáze:	OpenAIRE
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