A calculation model for the economic effects of implementing predictive maintenance algorithms into semiconductor fabrication lines
| Autor: | Koitzsch, Matthias, Honold, Alfred, Noll, Humbert, Nemecek, Alexander |
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| Rok vydání: | 2012 |
| DOI: | 10.24406/publica-fhg-377947 |
| Databáze: | OpenAIRE |
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