Zn-vapor diffused Er:Yb:LiNbO3 channel waveguides fabricated by means of SiO2 electron cyclotron resonance plasma deposition
| Autor: | R. Nevado, M.J. Hernández, Ginés Lifante, Eugenio Cantelar, P.L. Pernas, E Ruı́z, C Morant, Fernando Cussó |
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| Rok vydání: | 2000 |
| Předmět: |
Ytterbium
Fabrication Lithium niobate Analytical chemistry General Physics and Astronomy chemistry.chemical_element Surfaces and Interfaces General Chemistry Condensed Matter Physics Electron cyclotron resonance Surfaces Coatings and Films law.invention Erbium chemistry.chemical_compound chemistry law Homogeneity (physics) Reactive-ion etching Photolithography |
| Zdroj: | Applied Surface Science. 161:123-130 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/s0169-4332(00)00147-1 |
| Popis: | We report here the fabrication method and operation of Zinc-vapor diffused channel waveguides on Erbium/Ytterbium (Er/Yb)-doped Lithium Niobate (LiNbO3). electron cyclotron resonance (ECR) plasma deposition technique, UV photolithography and Reactive Ion Etching (RIE) are used to define an SiO2 mask for pattern transfer. The whole process is performed at low temperatures eliminating typical LiO2 out-diffusion problems and achieving low surface damage. The flexibility of the fabrication technology has been shown to be potentially applicable to integrated optics. EDAX measurements reveal good confinement and homogeneity of the diffused regions. Atomic Force Microscopy (AFM) surface characterization shows the swelling of the diffused areas, consistent with the topoepitaxial growth of a ZnxLiyNbzOw layer. |
| Databáze: | OpenAIRE |
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