The Fabrication of Bio-Inspired Chemical Vapor Sensors via Plasma Enhanced Chemical Vapor Deposition
| Autor: | Hao Jiang, Jesse O. Enlow, Lawrence L. Brott, Daniel M. Gallagher, Rajesh R. Naik, Timothy J. Bunning, Rachel Jakubiak |
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| Rok vydání: | 2010 |
| Předmět: |
Materials science
Hybrid physical-chemical vapor deposition technology industry and agriculture food and beverages Nanotechnology Chemical vapor deposition Combustion chemical vapor deposition equipment and supplies complex mixtures Carbon film Plasma-enhanced chemical vapor deposition Physical vapor deposition parasitic diseases Thin film Plasma processing |
| Zdroj: | Optical Interference Coatings. |
| DOI: | 10.1364/oic.2010.tud11 |
| Popis: | Plasma enhanced chemical vapor deposition (PECVD) of biologically active films is investigated for the fabrication of bio-inspired chemical vapor sensors, due to the ability to fabricate thin films with unique surface chemistries. |
| Databáze: | OpenAIRE |
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