Application of the photomodulated reflectance technique to the monitoring of metal layers

Autor:	Ferenc Ujhelyi, László Kocsányi, Gábor Dobos, Sándor Lenk, Zsófia Szita, András Somogyi
Rok vydání:	2011
Předmět:	Materials science business.industry Interface (computing) Analytical chemistry Condensed Matter Physics Reflectivity Signal on Finite element method Metal Semiconductor visual_art visual_art.visual_art_medium Optoelectronics business Layer (electronics)
Zdroj:	physica status solidi c. 8:2961-2964
ISSN:	1610-1642 1862-6351
DOI:	10.1002/pssc.201084115
Popis:	Photomodulated reflectance (PMR) measurement techniques are currently used for the monitoring of ultra-shallow junctions. This paper discusses the possibility of applying them to the characterisation of metal layers. A finite element method based computer model has been created to study the dependence of the PMR signal on different sample parameters. We present the results of these simulations and show that the method can be used to establish the thickness of a metal layer (if the material is known) and it can also provide information about the metal/semiconductor interface. This information might be used to characterise the barrier seed layer beneath the metal, by a non-contact and non-destructive way. Simulation results are also supported by actual measurements on test samples. (© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
Databáze:	OpenAIRE
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