Oxidation behavior of annealed CoCr thin films
| Autor: | B. G. Demczyk |
|---|---|
| Rok vydání: | 1993 |
| Předmět: |
Materials science
Annealing (metallurgy) Metallurgy Alloy chemistry.chemical_element Surfaces and Interfaces engineering.material Condensed Matter Physics Microstructure Surfaces Coatings and Films Chromium chemistry X-ray photoelectron spectroscopy engineering Grain boundary Thin film Composite material Cobalt |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 11:1458-1463 |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.578684 |
| Popis: | CoCr alloy thin films have solicited interest as potential perpendicular recording media. Enhancement of magnetic properties has been observed upon annealing. In this work, elemental redistribution and subsequent oxidation in annealed magnetron‐sputtered Co‐25%Cr alloy thin films of thicknesses 10 and 50 nm have been investigated by X‐ray photoelectron spectroscopy. Results indicate that chromium redistribution to the surface occurs upon extended annealing (360 °C, 10−6 Torr). Furthermore, it was found to be the most extensive in films exhibiting a columnar (high angle boundary) microstructure. This chromium is preferentially oxidized, thus preserving the desired magnetic properties of the cobalt‐based thin film. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|