Nanoscale structure and chemistry of Al0.49In0.51P thermal oxide

Autor:	B. P. Tinkham, D. T. Mathes, Russell D. Dupuis, R. D. Heller, Robert Hull
Rok vydání:	1999
Předmět:	chemistry.chemical_compound Physics and Astronomy (miscellaneous) Chemical engineering Chemistry Transmission electron microscopy Electron energy loss spectroscopy Inorganic chemistry Oxide Nanoscopic scale Electron spectroscopy Redox Layer (electronics) Amorphous solid
Zdroj:	Applied Physics Letters. 75:2572-2574
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.125081
Popis:	In this letter, the nanoscale structure and chemistry of the III–V thermal oxide formed from Al0.49In0.51P is described. Transmission electron microscopy studies have shown that the oxide is an amorphous compound, which occupies greater volume than the original unoxidized crystalline Al0.49In0.51P layer, and which contains O, Al, In, and P (i.e., none of the species are completely desorbed during the oxidation reaction). Electron energy loss spectroscopy and energy spectroscopic imaging have shown specifically that the oxidation products include Al2O3 and In2O3 and P, either as an oxide or in some other amorphous compound.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f9d5408ed97f56eb2bb457cce0adede8 https://doi.org/10.1063/1.125081 Zobrazit plný text záznamu