Nickel oxide (NiO) thin film optimization by reactive sputtering for highly sensitive formaldehyde sensing
| Autor: | Arvind K. Singh, Ashok Kr. Sharma, Vinay Goyal, Vikas Saini, Rahul Prajesh, Jitendra Bhargava, Mohd Nahid, Ajay Agarwal |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
Oxide Formaldehyde 02 engineering and technology 010402 general chemistry 01 natural sciences Metal chemistry.chemical_compound Sputtering Materials Chemistry Electrical and Electronic Engineering Thin film Instrumentation Nickel oxide Non-blocking I/O Metals and Alloys 021001 nanoscience & nanotechnology Condensed Matter Physics 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry Chemical engineering visual_art visual_art.visual_art_medium 0210 nano-technology Carbon monoxide |
| Zdroj: | Sensors and Actuators B: Chemical. 318:128166 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2020.128166 |
| Popis: | Trace level detection of formaldehyde (HCHO) is of utmost importance due to its harmful effects (carcinogenic) on humans. In the present work, we have deposited nickel oxide (NiO) using reactive sputtering technique with varying Ar:O2 ratio. It was found that NiO developed with Ar:O2 ratio of 70:30 exhibited the best response (operating temperature 200 °C) for formaldehyde. Developed metal oxide material is highly sensitive to formaldehyde with limit of detection as low as 50 ppb. Developed films were characterized for crystal structure using XRD, and surface morphology using AFM and SEM. Crystallographic assessment confirms the presence of face centered cubic phase of NiO and surface morphology of the film clearly shows the granular structure of the metal oxide film. Deposited NiO is found to be p-type which is confirmed by hotpoint probe, hall measurement as well as gas sensing behavior. The developed material was tested for various other indoor gases such as benzene (C6H6), carbon monoxide (CO), toluene (C7H8), and ammonia (NH3) and the material exhibited high selectivity towards HCHO. HCHO gas concentration ranging from 0.3 ppm to 2.5 ppm was tested on the sample. The material also showed good stability over the period of 3 months. |
| Databáze: | OpenAIRE |
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