ON-MEMS-CHIP Compact Temperature Sensor for Large-Volume, Low-Cost Sensor Calibration
| Autor: | Paolo Frigerio, Andrea Fagnani, Valentina Zega, Gabriele Gattere, Attilio Frangi, Giacomo Langfelder |
|---|---|
| Rok vydání: | 2023 |
| Zdroj: | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|