Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells
Autor: | V. Vega-Gonzalez, D. Radisic, S. Choudhury, D. Tierno, A. Thiam, D. Batuk, G.T. Martinez, F. Seidel, S. Decoster, S. Kundu, D. Tsvetanova, A. Peter, H. De Coster, A. Sepulveda-Marquez, E. Altamirano-Sanchez, Bt Chan, Y. Drissi, Y. Sherazi, J. Uk-Lee, I. Ciofi, G. Murdoch, N. Nagesh, G. Hellings, J. Ryckaert, S. Biesemans, E. Dentoni Litta, N. Horiguchi, S. Park, Zs. Tokei |
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Rok vydání: | 2022 |
Zdroj: | 2022 International Electron Devices Meeting (IEDM). |
Databáze: | OpenAIRE |
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