Characterization of thin films from reflection and transmission ellipsometric parameters

Autor:	Lianhua Jin, Sota Mogi, Tsutomu Muranaka, Eiichi Kondoh, Bernard Gelloz
Rok vydání:	2022
Předmět:	Physics and Astronomy (miscellaneous) General Engineering General Physics and Astronomy
Zdroj:	Japanese Journal of Applied Physics. 61:018004
ISSN:	1347-4065 0021-4922
DOI:	10.35848/1347-4065/ac42af
Popis:	Spectroscopic ellipsometry is a powerful tool for the characterization of thin films/surfaces. To simultaneously extract optical constant and film thickness from ellipsometric parameters ψ and Δ, dispersion models of material’s refractive index and spectroscopic ellipsometry measurement have been often required. In this work, we propose an extraction method of optical parameters of thin films from the reflection and transmission ellipsometric parameters. This method necessitates neither spectroscopic information of ψ and Δ, nor dispersion models. Verification measurements were carried out with the single-point and imaging ellipsometers, respectively.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f998000854a3a1ecf9cce8cb700b02f5 https://doi.org/10.35848/1347-4065/ac42af Zobrazit plný text záznamu