| Autor: |
Zhou Jia, Yiping Huang, Feidie Wu, Zongming Bao, Jianye Wang, Xinming Ji |
| Rok vydání: |
2006 |
| Předmět: |
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| Zdroj: |
2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings. |
| DOI: |
10.1109/icsict.2006.306394 |
| Popis: |
A MEMS thermal emitter based on heating thin film resistors has been studied for the MEMS infrared gas sensor as an infrared (IR) source. The IR source, with an effective emitting area of 1.6 times 1.6 mm2, is fabricated using heated platinum thin film resistors deposited on a Si3N4/Si02 membrane. IR radiation power of the emitter is up to 60mW with the effective blackbody temperature ranged from 300 to 850K. Moreover, it has very good dynamic parameters a modulation frequency as high as 100Hz and a response time of 23ms. The properties of the source demonstrate the potential applications to meet the performance, size and low-cost requirements of the mass market |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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