Friction and Wear in Lubricated MEMS
| Autor: | D. C. Senft, M. T. Dugger, B. K. Smith |
|---|---|
| Rok vydání: | 1998 |
| Zdroj: | Mechanical Behavior of Advanced Materials. |
| DOI: | 10.1115/imece1998-1144 |
| Popis: | The friction coefficient of a plasma-deposited hydrophobic, teflon-like film is measured using a surface micromachined (SMM) friction test device. At a contact pressure of 84 MPa, the initial friction coefficient is 0.13, rising to 0.20 after 4 × 105 wear cycles. The wear of the surfaces is characterized qualitatively by SEM. |
| Databáze: | OpenAIRE |
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