Development of microscopy for lithium analysis using medium-energy ion-stimulated desorption

Autor: Takane Kobayashi, Hideo Akiyama, T. Suzuki, Tsuyoshi Ohnishi, Kazunori Takada, Atsushi Kamoshida, Ken Watanabe
Rok vydání: 2014
Předmět:
Zdroj: Applied Physics Express. 7:106601
ISSN: 1882-0786
1882-0778
DOI: 10.7567/apex.7.106601
Popis: A medium-energy ion-stimulated desorption spectroscope was combined with a helium ion microscope to develop a microscope for lithium (Li) analysis with high spatial resolution below 10 nm. The analysis of Li is based on time-of-flight (TOF) spectroscopy. A clear Li peak was observed in the TOF spectra for the samples containing Li. The capability of the microscope was demonstrated using a LiCoO2/Nb doped SrTiO3 sample. Furthermore, the Li distribution on the sample was successfully observed by measuring the Li+ peak intensity as a function of the helium irradiation position.
Databáze: OpenAIRE