Spectroscopic IR ellipsometry of [100] and [001] oriented YBa2Cu3O7−δ films

Autor: Erik Wold, J. Bremer, O. Hunderi
Rok vydání: 1993
Předmět:
Zdroj: Thin Solid Films. 234:342-345
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90282-t
Popis: A spectroscopic technique for IR ellipsometry has been developed. The method is based on a complete Mueller analysis of the optical system and the systematic application of correction routines for experimentally measured Fourier coefficients. As a result the extinction ratio of the polarizers is not crucial for the measurements. Optical properties of microtwinned [100] and [001] oriented YBa 2 Cu 3 O 7−δ films were studied. Both samples had a thickness of 300 nm and were deposited onto SrTiO 3 substrates. The components of the out-of-plane and in-plane permittivity were calculated using data inversion and effective-medium theories for anisotropic grains.
Databáze: OpenAIRE