Design and implementation of a custom built variable temperature stage for a secondary ion mass spectrometer
| Autor: | Jay Tuggle, Jerry L. Hunter, Andrew Giordani |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Temperature control Chemistry Process Chemistry and Technology Analytical chemistry Mechanical engineering 02 engineering and technology Atmospheric temperature range 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Secondary ion mass spectrometry Secondary Ion Mass Spectroscopy Variable (computer science) 0103 physical sciences Thermal Materials Chemistry Stage (hydrology) Electrical and Electronic Engineering 0210 nano-technology Instrumentation |
| Zdroj: | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 34:03H112 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/1.4941785 |
| Popis: | The authors have built, designed, and implemented a variable temperature stage for a Cameca IMS 7f-GEO with an achievable temperature range of −150 to 300 °C and designed a new sample holder for rapid thermal stabilization. This paper focuses on the design and implementation aspects of the variable temperature stage in detail. The authors demonstrate applications where temperature control is useful for analyses that are not possible at room temperature. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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