Study of effect of deposition temperature of AlN films on SAW velocity using Brillouin spectroscopy
| Autor: | Omar Elmazria, Mercedes Vila, R. J. Jiménez Riobóo, M.B. Assouar |
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| Rok vydání: | 2007 |
| Předmět: |
Brillouin Spectroscopy
Materials science business.industry Mechanical Engineering Surface acoustic wave General Chemistry Nitride Sputter deposition Electronic Optical and Magnetic Materials Optics Physical vapor deposition Materials Chemistry Deposition (phase transition) Particle velocity Electrical and Electronic Engineering Thin film Composite material business |
| Zdroj: | Diamond and Related Materials. 16:1417-1420 |
| ISSN: | 0925-9635 |
| DOI: | 10.1016/j.diamond.2006.12.012 |
| Popis: | The study of the effect of the deposition temperature on the surface acoustic wave (SAW) propagation velocity of aluminum nitride (AlN) films has been made using Brillouin spectroscopy. The AlN films were deposited using magnetron sputtering technique. Acoustical and structural characterizations of the thin films were made to point out the effect of deposition temperature on acoustical properties. The results show a clear dependence of the SAW propagation velocity on the growth temperature of AlN films. The highest value of acoustic velocity was obtained for the film elaborated without heating. Structural characterization of the AlN films obtained at various deposition temperatures was carried out by X-ray diffraction. These analyses pointed out that the deposition temperature influences the standard deviation of (002) AlN film preferred orientation. The growth temperature clearly influences the acoustical and crystalline properties of AlN thin films. The AlN film obtained at lower deposition temperature presents the higher SAW velocity which we have determined by achievement of SAW device based on this AlN film. |
| Databáze: | OpenAIRE |
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