The electron bounce resonance in a low-pressure solenoidal inductive discharge

Autor:	S. S. Kim, Seong-Heon Seo, Chin-Wook Chung, K.-I. You, Hong-Young Chang
Rok vydání:	2001
Předmět:	Physics Argon Solenoidal vector field Resonance chemistry.chemical_element Electron Condensed Matter Physics symbols.namesake Distribution function chemistry Physics::Plasma Physics symbols Langmuir probe Diffusion (business) Atomic physics Energy (signal processing)
Zdroj:	Physics of Plasmas. 8:2992-2997
ISSN:	1089-7674 1070-664X
Popis:	The electron energy distribution functions (EEDFs) are measured by a rf compensated Langmuir probe in a solenoidal inductive reactor at various frequencies and at 2 mTorr of argon. The frequency dependence of the electron energy distribution function is clearly observed. The energy diffusion coefficients against the applied frequencies are calculated from the nonlocal heating theory. It is found that the bounce resonance electrons determine the energy diffusion coefficient shape and the electron energy distribution function at the bounce resonance energy in the energy diffusion coefficient begins to flatten. The exact bounce resonance condition in solenoidal inductive discharge is presented. It is reported that the frequency dependence of the EEDFs is mainly due to the electron bounce resonance in a finite-size solenoidal inductive discharge.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f8e8033a6f4e9c295ad9a5f63f4f7030 https://doi.org/10.1063/1.1364673 Zobrazit plný text záznamu