In-situ Surface Temperature Monitoring through Wafer Temperature Sensing and Heat Transfer Modeling for O2/N2 Plasma Process
| Autor: | Solbaro Kim, Hyun-woo Oh, Kwang-bo Sim |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE 2nd International Conference on Electronic Technology, Communication and Information (ICETCI). |
| DOI: | 10.1109/icetci55101.2022.9832050 |
| Databáze: | OpenAIRE |
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