Large scale micro-Fabry-Perot optical filter arrays

Autor: Ricky J. Morgan, Peter B. Griffin, Frida Strömqvist Vetelino, Ali A. Abtahi, Usha Raghuram, Francisco Tejada
Rok vydání: 2011
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.883824
Popis: Fabry-Perot filter arrays have been fabricated comprised of six million individual filters using standard semiconductor processing techniques. The current 3000x2000 array consists of 5x5 sub-arrays in which each of the nine micron wide Fabry-Perot filters in the sub-array has a different color response. The 5x5 sub-array is replicated to create a 600x400 matrix of 5x5 micro Fabry-Perot filter sub-arrays. This Fabry-Perot matrix has been integrated with a commercially available panchromatic 6 Megapixel CCD focal plane array to create a 25 color hyperspectral camera with 600x400 imaging pixels. Near-UV, visible and NIR filter arrays have been fabricated. The semiconductor processing technique permits filter arrays of general filter size, shape, configuration and distribution to be implemented with ease.
Databáze: OpenAIRE