Modeling of thermal conductance in an uncooled microbolometer pixel
| Autor: | Jan P. Huissoon, Patricia M. Nieva, Mustafa Yavuz, Nezih Topaloglu |
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| Rok vydání: | 2010 |
| Předmět: |
Microelectromechanical systems
Materials science Pixel business.industry Thermal resistance Composite number Metals and Alloys Microbolometer Mechanics Condensed Matter Physics Finite element method Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Thermal conductivity Heat equation Electrical and Electronic Engineering business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 157:235-245 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2009.11.018 |
| Popis: | Accurate estimation of thermal conductance is critical for designing new uncooled microbolometers since it is used to predict their performance. In this study, we propose a new analytical method for the estimation of the thermal conductance of two common pixel architectures. The method involves the simplification of the microbolometer pixel into a one-dimensional composite region and solves the heat equation analytically. It also considers the radial thermal conductance, occurring due to the heat flow from the IR sensitive plate to the arms, using the constriction thermal resistance between the arms and the plate. The proposed solution is very practical and can be easily modified to be used with other microbolometer shapes. Finite element modeling and experimental measurements are used to validate the analytical model which is also compared to more conventional approaches found in the literature. For the two shapes under study, test structures of different sizes were fabricated using PolyMUMPs. It is shown that for both of these geometries, the proposed method estimates the thermal conductance with a maximum discrepancy of 10% with respect to the experimental results, compared to the 42% usually obtained with more conventional models. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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