Reference samples for the spatial characteristics of nanostructures based on amorphous multilayer coatings

Autor:	E. A. Morozova, Sergey S. Zarubin, V. S. Bormashov, Andrey S. Baturin, M. A. Ermakova, P. A. Todua, S. A. Morozov, Andrey M. Markeev, E. V. Korostylev
Rok vydání:	2013
Předmět:	Standard sample Accuracy and precision Atomic layer deposition Materials science Nanostructure Applied Mathematics Nanotechnology Reflectometry Instrumentation Metrology Amorphous solid
Zdroj:	Measurement Techniques. 56:605-611
ISSN:	1573-8906 0543-1972
DOI:	10.1007/s11018-013-0252-8
Popis:	The development of the reference samples SPAM-20 and SPAM-100 for the spatial characteristics of nanostructures, based on periodic multilayer Al2O3/TiO2 coatings and intended for monitoring measurement accuracy and certification of x-ray reflectometry measurement techniques, is discussed. The metrological characteristics of these standard samples are examined.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::f839cfe0c7fcf9d569f2f31d5987cd82 https://doi.org/10.1007/s11018-013-0252-8 Zobrazit plný text záznamu Full text from SpringerLink