Verification of a Maxwellian electron-energy distribution in the ICP

Autor: Gary M. Hieftje, Mao Huang, D.S. Hanselman, Pengyuan Yang, Curtis A. Monnig
Rok vydání: 1990
Předmět:
Zdroj: Spectrochimica Acta Part B: Atomic Spectroscopy. 45:511-520
ISSN: 0584-8547
DOI: 10.1016/0584-8547(90)80126-4
Popis: A 20-Hz frequency-doubled Q-switched Nd : YAG laser has been used to measure Thomson-scattering spectra from an inductively coupled argon plasma (ICP). The experimental data were treated with a non-linear regression curve-fitting program to determine electron temperatures and electron number densities under different plasma operating conditions. A comparison of the measured Thomson-scattering spectra with the corresponding fitted curves indicates that the electron energy distributions in the ICP are very close to Maxwellian under a wide range of sample-introduction conditions and at locations above, below, and at the tip of the “bullet”. As a result, electron temperature can be used as a meaningful fundamental parameter. The theory used in this study is briefly reviewed and the detailed experimental considerations are described.
Databáze: OpenAIRE